Adhesion aspects in MEMS-NEMS / edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS d...
Full description
Saved in: