Adhesion aspects in MEMS-NEMS

Adhesion aspects in MEMS-NEMS / edited by S.H. Kim, M.T. Dugger and K.L. Mittal.

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS d...

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Bibliographic Details
Other Authors: Kim, Seong H., Dugger, M. T. (Michael T.), Mittal, K. L., 1945-
Format: eBook
Language:English
Published: Leiden ; Boston : Vsp, ©2010.
Subjects:
Microelectromechanical systems.
Nanoelectromechanical systems.
Adhesion.
Surfaces (Technology)
adhesion.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Adhesion
Microelectromechanical systems
Nanoelectromechanical systems
Online Access:Click for online access
Description
Summary:Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface.
Physical Description:1 online resource (xi, 409 pages) : illustrations
Bibliography:Includes bibliographical references.
ISBN:9004190953
9789004190955
9781615839476
161583947X
Source of Description, Etc. Note:Print version record.

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