Description
Summary: | Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface.
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Physical Description: | 1 online resource (xi, 409 pages) : illustrations |
Bibliography: | Includes bibliographical references. |
ISBN: | 9004190953 9789004190955 9781615839476 161583947X |
Source of Description, Etc. Note: | Print version record. |