Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

Full description

Saved in:
Bibliographic Details
Corporate Author: International Conference on MEMS and Nanotechnology Shenzhen, China
Other Authors: Liu, Changhui (Editor)
Format: eBook
Language:English
Published: Zurich, Switzerland : Trans Tech Publications, [2014]
Series:Advanced materials research ; v. 901.
Subjects:
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Nanotechnology
Conference papers and proceedings
Online Access:Click for online access
Login for hold information

‌

Click for online access

Online

Holdings details from Online
Status: Available

Similar Items