Electrochemical micromachining for nanofabrication, MEMS and nanotechnology

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, includin...

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Bibliographic Details
Main Author: Bhattacharyya, Bijoy (Author)
Format: eBook
Language:English
Published: Oxford, UK : William Andrew, an imprint of Elsevier, [2015]
Series:Micro & nano technologies.
Subjects:
Micromachining.
Nanotechnology.
Microelectromechanical systems.
TECHNOLOGY & ENGINEERING > Engineering (General)
TECHNOLOGY & ENGINEERING > Reference.
Microelectromechanical systems
Micromachining
Nanotechnology
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