Electrochemical micromachining for nanofabrication, MEMS and nanotechnology

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, includin...

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Bibliographic Details
Main Author: Bhattacharyya, Bijoy (Author)
Format: eBook
Language:English
Published: Oxford, UK : William Andrew, an imprint of Elsevier, [2015]
Series:Micro & nano technologies.
Subjects:
Micromachining.
Nanotechnology.
Microelectromechanical systems.
TECHNOLOGY & ENGINEERING > Engineering (General)
TECHNOLOGY & ENGINEERING > Reference.
Microelectromechanical systems
Micromachining
Nanotechnology
Online Access:Click for online access
Table of Contents:
  • Front Cover; Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology; Copyright; Dedication; Contents; About the Author; Foreword; Preface; Acknowledgment; Symbols; CHAPTER 1
  • INTRODUCTION; 1.1 MICROMACHINING AND NANOFABRICATION; 1.2 MEMS AND MICROSYSTEMS; 1.3 CONDITIONS FOR MICROMACHINING AND NANOFABRICATION; 1.4 TYPES OF MICROMACHINING PROCESSES; 1.5 ELECTROCHEMICAL MICROMACHINING; 1.6 ELECTROCHEMICAL TECHNOLOGY FOR MICROSYSTEMS AND NANOFABRICATION; REFERENCES; CHAPTER 2
  • ELECTROCHEMICAL MACHINING: MACRO TO MICRO; INTRODUCTION; 2.1 BACKGROUND OF ECM
  • 2.2 FUNDAMENTALS OF ANODIC DISSOLUTION2.3 IMPORTANT INFLUENCING FACTORS OF ECM FOR MICROMACHINING; 2.4 EMM: PRESENT STATUS; REFERENCES; CHAPTER 3
  • PRINCIPLE OF MATERIAL REMOVAL IN ELECTROCHEMICAL MICROMACHINING; 3.1 MECHANISM OF MATERIAL REMOVAL; 3.2 EQUIVALENT ELECTRICAL CIRCUIT FOR EMM; 3.3 MRR MODEL; REFERENCES; CHAPTER 4
  • TYPES OF EMM; INTRODUCTION; 4.1 THROUGH-MASK EMM; 4.2 MASKLESS EMM; 4.3 THREE-DIMENSIONAL EMM; REFERENCES; CHAPTER 5
  • ELECTROCHEMICAL MICROMACHINING SETUP; 5.1 DETAILS OF EMM SETUP; 5.2 CURRENT STATUS OF DEVELOPMENTS IN EMM SETUP; 5.3 IEG CONTROL STRATEGY; REFERENCES
  • CHAPTER 6
  • DESIGN AND DEVELOPMENTS OF MICROTOOLSINTRODUCTION; 6.1 TYPES OF EMM TOOLS; 6.2 MICROTOOL DESIGN FOR EMM; 6.3 METHODS OF MICROTOOL FABRICATION; 6.4 EMM FOR MICROTOOL FABRICATION; 6.5 DIFFERENT FEATURES OF MICROTOOLS FABRICATED BY EMM; REFERENCES; CHAPTER 7
  • INFLUENCING FACTORS OF EMM; INTRODUCTION; 7.1 EMM POWER SUPPLY; 7.2 ELECTROLYTE FOR EMM; 7.3 INFLUENCE OF IEG; 7.4 INFLUENCE OF TEMPERATURE, CONCENTRATION, AND ELECTROLYTE FLOW; 7.5 INFLUENCE OF TOOL FEED RATE; REFERENCES; CHAPTER 8
  • IMPROVEMENT OF MACHINING ACCURACY; INTRODUCTION; 8.1 TOOL INSULATION
  • 8.2 ELECTROLYTE CIRCULATION8.3 SHAPE OF THE MICROTOOL; 8.4 TOOL MOVEMENT STRATEGY; 8.5 STRAY CURRENT AND MICROSPARKS PHENOMENA IN EMM; 8.6 HYBRID EMM; 8.7 SELECTION OF COMBINATION OF MACHINING PARAMETERS; REFERENCES; CHAPTER 9
  • ADVANTAGES, LIMITATIONS, AND APPLICATIONS OF EMM; INTRODUCTION; 9.1 ADVANTAGES; 9.2 APPLICATIONS; 9.3 LIMITATIONS AND REMEDIES; REFERENCES; CHAPTER 10
  • MICRODEVICES FABRICATION FOR MICROELECTROMECHANICAL SYSTEMS AND OTHER MICROENGINEERING APPLICATIONS; INTRODUCTION; 10.1 MICROELECTROMECHANICAL SYSTEMS; 10.2 SEMICONDUCTOR MICROMACHINING BY EMM
  • 10.3 MICROENGINEERING APPLICATIONSREFERENCES; CHAPTER 11
  • ELECTROCHEMICAL MICROSYSTEM TECHNOLOGY; INTRODUCTION; 11.1 FEATURES OF EMST; 11.2 SCALING DOWN AND SCALING UP; 11.3 ELECTROCHEMICAL MICROCELL AND MICROELECTRODE; 11.4 ELECTROCHEMICAL REACTIONS IN EMST; 11.5 APPLICATIONS OF EMST IN MICROSYSTEM TECHNOLOGY; REFERENCES; CHAPTER 12
  • RECENT ADVANCEMENTS IN EMM FOR MICRO AND NANOFABRICATION; INTRODUCTION; 12.1 WIRE EMM; 12.2 SOLID-STATE EMM; 12.3 SURFACE STRUCTURING; 12.4 ELECTROCHEMICAL WET STAMPING; 12.5 ELECTROCHEMICAL PATTERNING BY ENFACE TECHNOLOGY; 12.6 NANOFABRICATION BY EMM

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