Mechanics of Microsystems.
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems ta...
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Bibliographic Details
Main Author: |
Corigliano, Alberto |
Other Authors: |
Ardito, Raffaele,
Comi, Claudia,
Frangi, Attilio,
Ghisi, Aldo,
Mariani, Stefano |
Format: | eBook
|
Language: | English |
Published: |
Newark :
John Wiley & Sons, Incorporated,
2017.
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Series: | Microsystem and Nanotechnology Series (ME20) Ser.
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Subjects: | |
Online Access: | Click for online access
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