Mechanics of Microsystems.

Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems ta...

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Bibliographic Details
Main Author: Corigliano, Alberto
Other Authors: Ardito, Raffaele, Comi, Claudia, Frangi, Attilio, Ghisi, Aldo, Mariani, Stefano
Format: eBook
Language:English
Published: Newark : John Wiley & Sons, Incorporated, 2017.
Series:Microsystem and Nanotechnology Series (ME20) Ser.
Subjects:
Online Access:Click for online access