Micromachined circuits and devices : microwave to sub-millimeter applications

Micromachined circuits and devices : microwave to sub-millimeter applications / Shiban Kishen Koul, Sukomal Dey.

This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency r...

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Bibliographic Details
Main Authors: Koul, Shiban K. (Author), Dey, Sukomal (Author)
Format: eBook
Language:English
Published: Singapore : Springer, 2022.
Series:Lecture notes in electrical engineering ; v. 859.
Subjects:
Microelectromechanical systems.
Micromachining.
Nanoscience.
Metamaterials.
Metamaterials
Microelectromechanical systems
Micromachining
Nanoscience
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