Silicon sensors and actuators : the Feynman roadmap / Benedetto Vigna, Paolo Ferrari, Flavio Francesco Villa, Ernesto Lasalandra, Sarah Zerbini, editors.
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judg...
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Bibliographic Details
| Other Authors: |
Vigna, Benedetto
(Editor),
Ferrari, Paolo
(Editor),
Villa, Flavio Francesco
(Editor),
Lasalandra, Ernesto
(Editor),
Zerbini, Sarah
(Editor) |
|---|
| Format: | eBook
|
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| Language: | English |
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| Published: |
Cham, Switzerland :
Springer,
2022.
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| Subjects: | |
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| Online Access: | Click for online access
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